发明名称 AVALANCHE PHOTOTECTOR WITH INTEGRATED MICRO LENS
摘要 Provided is an avalanche photodetector with an integrated micro lens. The avalanche photodetector includes a light absorbing layer on a semiconductor substrate, an amplification layer on the light absorbing layer, a diffusion layer within the amplification layer, and the micro lens disposed corresponding to the diffusion layer. The micro lens includes a first refractive layer and a second refractive layer having a refractive index less than that of the first refractive layer.
申请公布号 US2011140168(A1) 申请公布日期 2011.06.16
申请号 US20100769198 申请日期 2010.04.28
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 SIM JAE-SIK;MHEEN BONGKI;OH MYUNGSOOK;KWON YONG-HWAN;NAM EUN SOO
分类号 H01L31/107 主分类号 H01L31/107
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