发明名称 Devices with Cavity-Defined Gates and Methods of Making the Same
摘要 Disclosed are methods, systems and devices, including a method that includes the acts of forming a semiconductor fin, forming a sacrificial material adjacent the semiconductor fin, covering the sacrificial material with a dielectric material, forming a cavity by removing the sacrificial material from under the dielectric material, and forming a gate in the cavity.
申请公布号 US2011143528(A1) 申请公布日期 2011.06.16
申请号 US201113028064 申请日期 2011.02.15
申请人 MICRON TECHNOLOGY, INC. 发明人 JUENGLING WERNER
分类号 H01L21/28 主分类号 H01L21/28
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