| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electric cable that can suppress heat generation and shield generated magnetic noises and those transmitted from the outside, and to provide a power supply device, a substrate processing apparatus and a method for manufacturing a device. <P>SOLUTION: The electric supply apparatus 31 includes an electric cable 33 and a first housing member 34, wherein a housing space 36 is provided in the inside, to house at least a portion of the electric cable 33 in the lengthwise direction, and a liquid metal for shielding magnetic noise. <P>COPYRIGHT: (C)2011,JPO&INPIT |
