| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibrator having heightened detection sensitivity, concerning a vibrator, a vibrator array or the like. <P>SOLUTION: The vibrator includes: a vibrating body that vibrates in a thickness shear vibration mode; a first adsorption film formed in a first region on a first surface of the vibrating body; a second adsorption film formed in a second region on a second surface opposing to the first surface of the vibrating body; and a substrate with a surface on which the vibrating body is erected, wherein the vibrating body has a contact with a substrate on a third surface that is different from the first surface and the second surface. <P>COPYRIGHT: (C)2011,JPO&INPIT |
