发明名称 METHOD FOR DICING WAFER, METHOD FOR MOUNTING, METHOD FOR MANUFACTURING CHIP WITH ADHESIVE LAYER, AND MOUNTED BODY
摘要 <P>PROBLEM TO BE SOLVED: To secure the visibility of a wafer cutting line and to simply stick an adhesive layer to each chip. <P>SOLUTION: A method for dicing a wafer includes: a mounting step of mounting a wafer 20 on a dicing sheet 21; a dicing step of dicing the wafer 20 into a plurality of chips 30; an adhesive layer forming step of forming an adhesive layer 31 on a surface of the wafer 20 after the dicing step; and an expanding step of expanding the dicing sheet 21, on which the wafer 20 is mounted, to separate the wafer 20 and the adhesive layer 31 into each piece. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011119767(A) 申请公布日期 2011.06.16
申请号 JP20110049336 申请日期 2011.03.07
申请人 SONY CHEMICAL & INFORMATION DEVICE CORP 发明人 KOJIMA RYOJI
分类号 H01L21/301;H01L21/60 主分类号 H01L21/301
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