发明名称 |
METHOD FOR DICING WAFER, METHOD FOR MOUNTING, METHOD FOR MANUFACTURING CHIP WITH ADHESIVE LAYER, AND MOUNTED BODY |
摘要 |
<P>PROBLEM TO BE SOLVED: To secure the visibility of a wafer cutting line and to simply stick an adhesive layer to each chip. <P>SOLUTION: A method for dicing a wafer includes: a mounting step of mounting a wafer 20 on a dicing sheet 21; a dicing step of dicing the wafer 20 into a plurality of chips 30; an adhesive layer forming step of forming an adhesive layer 31 on a surface of the wafer 20 after the dicing step; and an expanding step of expanding the dicing sheet 21, on which the wafer 20 is mounted, to separate the wafer 20 and the adhesive layer 31 into each piece. <P>COPYRIGHT: (C)2011,JPO&INPIT |
申请公布号 |
JP2011119767(A) |
申请公布日期 |
2011.06.16 |
申请号 |
JP20110049336 |
申请日期 |
2011.03.07 |
申请人 |
SONY CHEMICAL & INFORMATION DEVICE CORP |
发明人 |
KOJIMA RYOJI |
分类号 |
H01L21/301;H01L21/60 |
主分类号 |
H01L21/301 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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