| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezoelectrically driving valve and a piezoelectrically driven flow volume control apparatus capable of controlling even a fluid with a temperature exceeding a use range temperature of a piezoelectric actuator. <P>SOLUTION: The piezoelectrically driven valve includes a valve element 2 for opening/closing a fluid flow passage 1b, the piezoelectric actuator 10 for driving opening/closing of the valve element 2 by using extension of a piezoelectric element, and a heat radiation spacer 40 for holding up and supporting the piezoelectric actuator 10 so as to locate it away from the fluid flow passage 1b and radiating heat transmitted to the piezoelectric actuator 10 from a fluid flowing in the fluid flow passage 1b. More favorably, the piezoelectric driving type valve includes a supporting cylinder 23A housing and supporting both of the piezoelectric actuator 10 and the heat radiation spacer 40. In the supporting cylinder 23A, at least a part for housing the heat radiation spacer 40 is formed of a material with the same thermal expansion coefficient as that of the heat radiation spacer 40. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
