| 摘要 |
PROBLEM TO BE SOLVED: To prevent contamination of a substrate with particles as much as possible in a substrate conveyance device. SOLUTION: A diffusion prevention cover 121 as a diffusion prevention member is installed on a pick body 115. The diffusion prevention cover 121 has a bottom wall portion 121a which receives particles generated and falling by rubbing between a sliding block 123 and a linear guide 119, and a sidewall portion 121b raised up from the bottom wall portion 121a substantially in a vertical direction. The sidewall portion 121b receives the particles similarly to the bottom wall portion 121b, and also seals the particles so as not to be scattered to the outside. COPYRIGHT: (C)2011,JPO&INPIT
|
