发明名称 IMAGE SYNTHESIZER AND IMAGE SYNTHESIS METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an image synthesizer which has a small effect of beam absorption on a device under test, and an image synthesis method. <P>SOLUTION: While actually-detected forward diffraction beam intensity and diffraction beam intensity contain effects of beam absorption in a tested body Sa, this method assumes that attenuation rates caused by beam absorption in these beams when passing through the tested body are the same. Based on the forward diffraction beam intensity and the diffraction beam intensity containing no effect of attenuation indicated by the attenuation rate, forward diffraction beam intensity and diffraction beam intensity, a refraction angleθ<SB>0</SB>of the beam when passing through the device under test Sa is calculated, then the refraction angleθ<SB>0</SB>is used to obtain a synthetic image of the tested body Sa. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011117954(A) 申请公布日期 2011.06.16
申请号 JP20100244356 申请日期 2010.10.29
申请人 TOKYO UNIV OF SCIENCE;YAMAGATA UNIV;IBARAKI PREFECTURE 发明人 ANDO MASAMI;SUNAGUCHI NAOTERU;SHIMAO DAISUKE;YUASA TETSUYA
分类号 G01N23/04;G01N23/20 主分类号 G01N23/04
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