| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing method which quickly polishes a corner part formed of a reverse surface and an outer peripheral surface, without damaging a thin base board ground on a reverse surface. SOLUTION: This method is provided for polishing the base board after grinding the reverse surface. This polishing method polishes the corner part by pushing a polishing tape 23 against the corner part formed of the reverse surface and the outer peripheral surface of the base board W. In polishing, the polishing tape 23 is sent at a predetermined speed. The corner part can also be polished while changing a contact angle between the corner part and the polishing tape. COPYRIGHT: (C)2011,JPO&INPIT |
