| 摘要 |
A transfer device includes a first transfer mechanism including a first shaft which is rotatable and vertically arranged and a horizontally extensible and retractable first arm having at a leading end thereof a first pick for holding a processing target object, the first arm being attached to the first shaft; and a second transfer mechanism including a second shaft which is rotatable and vertically arranged and a horizontally extensible and retractable second arm having at a leading end thereof a second pick for holding a processing target object, the second arm being attached to the second shaft. The first and the second transfer mechanism are vertically separated from each other while a rotation center of the first shaft and a rotation center of the second shaft coincide with each other.
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