| 摘要 |
An electron detection device including: one scintillator 31 having an opening through which an electron beam emitted from an electron gun passes; a plurality of photoguides 22 of the same shape, which are bonded to the scintillator and disposed symmetrically about an optical axis; and a photomultiplier tube which is connected to one side of each of the photoguides 22, the side opposing to the optical axis side, and converts light into electrical signals, the light being emitted by the scintillator 31 receiving light through the photoguide 22. The photoguides 22 are joined so as to equally divide the scintillator 31 symmetrically about the optical axis. Moreover, a position and an area of a portion bonded to the scintillator 31, in each of the photoguides 22, are the same among the photoguides 22.
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