| 摘要 |
<p>Provided is an electron microscope that allows quantitative element imaging with a high S/N and measurement of electron energy-loss spectra with high energy precision and energy resolution. When measuring a characteristic X-ray spectrum or electron energy-loss spectrum by irradiating one irradiation location on a sample with an electron beam for a given amount of time and scanning the surface of the sample to form a Z-contrast image, dead time due to excess X-rays is corrected for characteristic X-ray spectra, and energy correction based on the zero-loss peak is performed for electron energy-loss spectra. For characteristic X-rays, the provided electron microscope allows quantitative element imaging with a high S/N, and for electron energy-loss spectra, the provided electron microscope allows both element imaging with a high S/N and measurement of spectra with high energy resolution.</p> |
