PLASMA IGNITION DEVICE, PLASMA IGNITION METHOD, AND PLASMA GENERATION DEVICE

摘要

Disclosed is a plasma ignition technology capable of easily and reliably igniting and reigniting plasma without monitoring or human intervention thereupon. The plasma ignition device comprises a high-frequency power supply device (101) that generates and supplies a prescribed high-frequency signal (HS) to an anode (114) for plasma generation; a coordination device (105) that coordinates the impedance upon the high-frequency power supply device and the anode; a progressive wave/reflected wave detection device (102) that detects the progressive waves and the reflected waves of the high-frequency signal (HS); a high-voltage generation device (103) that generates a prescribed high voltage (HV); and a control device (100) that superimposes the high voltage (HV) upon the high-frequency signal (HS) when the ratio of reflected waves to progressive waves exceeds a first threshold.