申请人 |
LAM RESEARCH CORPORATION;WANG, YAXIN;LI, SHIJIAN;REDEKER, FRITZ;PARKS, JOHN;KOLICS, ARTUR;YOON, HYUNGSUK, ALEXANDER;DE FILIPE, TAREK, SUWWAN;KOROLIK, MIKHAIL |
发明人 |
WANG, YAXIN;LI, SHIJIAN;REDEKER, FRITZ;PARKS, JOHN;KOLICS, ARTUR;YOON, HYUNGSUK, ALEXANDER;DE FILIPE, TAREK, SUWWAN;KOROLIK, MIKHAIL |