FILM FORMING DEVICE FOR ORGANIC THIN FILMS, AND METHOD FOR FORMING FILM USING ORGANIC MATERIALS

摘要

An organic material, which is supplied little by little into a vapor tank (41), is heated by coming into contact with a heating unit (43), and is introduced into a buffer device (50) as vapor. The buffer device (50) is provided with a buffer unit (52) having a flow path, and the vapor, which flows through the flow path, collides with the buffer unit (52) and attaches to the buffer unit (52) as a solid organic material. Once the surface of the buffer unit (52) is covered with the solid organic material, the variation in the amount of vapor generated within the vapor tank (41) becomes eliminated by means of the buffer unit (52), and the amount of vapor discharged from a discharge device (12) stabilizes. Until the amount of vapor discharged from the discharge device (12) stabilizes, the vapor is guided into a trap device (60) and is precipitated on the surface of a trapping unit (62), thereby collecting and being able to reuse the vapor.