| 摘要 |
PURPOSE: A showerhead assembly for a vacuum processing apparatus is provided to implement thermal expansion and contraction without a structural stress on a chamber body. CONSTITUTION: A chamber(100) comprises a chamber body(102). A supporting board(105) supports more than one substrate. A back plate(125) is fixed in order to be shut tightly in the chamber body. A shower head plate(120) is attached to the back plate. The shower head plate comprises a plurality of holes dispersing the gas within the chamber. |
