发明名称 |
SAMPLE CONVEYING MECHANISM |
摘要 |
A sample conveying mechanism minimizes a risk of damage to a sample typified particularly by a photomask, and the sample conveying mechanism provides the sample retention mechanism for holding the sample so as to be suspended and is configured such that a portion close to a pattern surface of the sample is separated from a projection section of a flange for suspending the sample, thereby inhibiting a contact between the pattern surface and members configuring the conveying mechanism.
|
申请公布号 |
US2011142578(A1) |
申请公布日期 |
2011.06.16 |
申请号 |
US200913057602 |
申请日期 |
2009.07.29 |
申请人 |
KAWAKAMI KATSUYA;TSUNODA MASAHIRO;GUNJI TAKASHI;SATO HIDETOSHI |
发明人 |
KAWAKAMI KATSUYA;TSUNODA MASAHIRO;GUNJI TAKASHI;SATO HIDETOSHI |
分类号 |
B65G49/06;H01L21/677 |
主分类号 |
B65G49/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|