| 摘要 |
The present invention discloses a flexible probe structure comprises at least one electrode using a CNT layer as the electrode interface. The CNT layer disposed on the electrode surface is processed with an UV-ozone treatment to form a great number of carbon-oxygen functional groups on the surface of CNT. The carbon-oxygen functional groups can greatly reduce the interface impedance of the electrode and the biological tissue fluid. Thereby, the measurement can achieve better quality. The present invention also discloses a method for fabricating a flexible probe structure, which comprises steps: preparing a flexible substrate; forming a conductive layer on the flexible substrate, and defining an electrode, a wire and a metal pad on the conductive layer; forming a CNT layer on the electrode; forming an insulating layer on the conductive layer to insulate the wire from the environment; and processing the CNT layer with an UV-ozone treatment.
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