摘要 |
An Acoustic Confocal Interferometry microscope for use with a suitably selected acoustic emitter and acoustic detector for providing three-dimensional information on the state of an object is presented. The microscope has a coherent wavelength source for producing a coherent beam, scanning means for moving said coherent beam in a suitably selected pattern, and means for producing and focusing an object beam and an interference beam to an object focal point and an interference focal point, respectively. The object beam has a transmission path of essentially the same length of the transmission path of the interference beam. The object beam intercepts an object at the object focal point while the interference beam passes by the object. There are also means for defining the object beam and the interference beam based on the position of the object focal point and the geometry of the convergence angles and means for producing an interference pattern between the object focal point and the interference focal point.
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