| 摘要 |
There is provided a detect inspection method and apparatus capable of performing a quick process of determining whether defects on a disk form an annular scratch defect or an island defect, by detecting an annular scratch defect in sum track areas with a deviation exceeding the standard deviation of an amount of defects detected in radius, in the histogram data containing the number of defects in radius, or by detecting an island defect in sum angle areas with a deviation exceeding the standard deviation of an amount of defects detected in angle, in the histogram data containing the number of defects in angle. Thus, the defect detection process can be performed step by step, by separating the annular scratch defect or the island defect from the other detects. As a result, a process load on the data processor can be reduced even if the number of detected defects increases.
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