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发明名称
Wässrige Lösung zum kontinuierlichen Mikroätzen von Kupfer oder Kupferlegierung
摘要
申请公布号
DE10136078(B4)
申请公布日期
2011.06.16
申请号
DE20011036078
申请日期
2001.07.25
申请人
MEC CO. LTD.
发明人
KURII, YOSHIHIRO;KAMEDA, ETSUJI;NAKAMURA, SACHIKO
分类号
C23F1/18;H01L21/3213;H01L21/768;H05K3/38
主分类号
C23F1/18
代理机构
代理人
主权项
地址
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