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发明名称
Beleuchtungsvorrichtung für eine mikrolithographische Projektionsbelichtungsanlage mit einem optischen Element aus einem uniaxialen Kristall mit mehreren parallel oder senkrecht zur Kristallachse angeordneten refraktiven oder diffraktiven Strukturen
摘要
申请公布号
DE602007014285(D1)
申请公布日期
2011.06.16
申请号
DE20076014285T
申请日期
2007.03.09
申请人
CARL ZEISS SMT AG
发明人
SCHUSTER, KARL-HEINZ;HARTMAIER, JUERGEN;MAUL, MANFRED;SCHMEREK, DIETER;MUELLER, DETLEV;HAHNEMANN, OTTO;MARIANEK, FRANK;WEISS, GUNDULA;FIOLKA, DAMIAN
分类号
G02B1/08;G02B3/00;G02B27/00;G03B27/72
主分类号
G02B1/08
代理机构
代理人
主权项
地址
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