| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pellicle which is minimized in cracked gas generation and haze generation even when ArF excimer laser radiation impinges against a pressure-sensitive adhesive layer on an inner wall during long-term service. <P>SOLUTION: The pellicle comprises a pellicle film 1, a pellicle frame 3, and a pressure-sensitive adhesive layer 2, in which the pellicle film is stretched across and mounted on the upper end face of the pellicle frame, and the pressure-sensitive adhesive layer is disposed on the lower end face of the pellicle frame so that the pellicle frame can be attached to a substrate. The pellicle further has an inner wall pressure-sensitive adhesive layer on the inner wall of the pellicle frame, the layer formed of a cured product of a curable composition containing a perfluoro compound having a perfluoro structure in the main chain. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
