| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveying method of a workpiece suppressing a situation causing upper limit of productivity even when a treatment time in various treatment is shortened. SOLUTION: A treatment chamber is structured to treat n workpieces simultaneously (n is a natural number of 2 or more). A conveying device is configured to hold the (n+1) or more workpieces. The conveying method includes a process for conveying the n workpieces before treatment from a load lock chamber to a conveying chamber by using the conveying device; (1) a process for conveying at least one treated workpiece from the treatment chamber to the conveying chamber by using the conveying device; and (2) a process for conveying at least one workpiece before treatment held on the conveying device, from the conveying chamber to the treatment chamber by using the conveying device. The processes (1) and (2) are repeated until the treated workpieces housed in the treatment chamber are totally replaced with the workpieces before treatment held on the conveying device (the process 2). COPYRIGHT: (C)2011,JPO&INPIT |
