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发明名称
ION BEAM SOURCE
摘要
This invention relates an ion beam source (10) for use with a non-electrical conducting target (14) including a grid (13) for extracting ions and a power supply for supplying pass power to the grid (13) to extract the ions.
申请公布号
US2011139605(A1)
申请公布日期
2011.06.16
申请号
US20100967304
申请日期
2010.12.14
申请人
SPP PROCESS TECHNOLOGY SYSTEMS UK LIMITED
发明人
MACNEIL JOHN;BENNETT PAUL GEORGE
分类号
C23C14/46;H01J27/02
主分类号
C23C14/46
代理机构
代理人
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