Evaporation device for coating systems for high-temperature gas evaporation of a material, comprises a section for the gas flow and a heat source, which heats in the section of the gas-material mixture

摘要

The evaporation device for coating systems for high-temperature gas evaporation of a material at 1200[deg] C, comprises a section for the gas flow and a heat source (2, 3), which heats in the section of the gas-material mixture in order to thermally evaporate the material in the gas. The heat source comprises an induction activator and an induction body in which eddy current is excited by the induction activator. A thermal insulating element (5) is provided between the induction activator and the induction body. The induction activator is transparent for the electromagnetic inductive activator. The evaporation device for coating systems for high-temperature gas evaporation of a material at 1200[deg] C, comprises a section for the gas flow and a heat source (2, 3), which heats in the section of the gas-material mixture in order to thermally evaporate the material in the gas. The heat source comprises an induction activator and an induction body in which eddy current is excited by the induction activator. A thermal insulating element (5) is provided between the induction activator and the induction body. The induction activator is transparent for the electromagnetic inductive activator. The induction body and the section are arranged so that the gas-material-mixture is heated in the section through induction body heated by induction. The induction activator is provided with a cooling device, which is formed as a water cooler (6), and is formed as an induction coil, which is hollow inside and has copper as material. The section is formed for gas supply through a gas feed pipe (4) that is arranged in inside of the induction bodies. The gas feed pipe is formed in spiral-shaped manner and is formed from an electrically non-conductive material. The gas feed pipe has silicon carbide, graphite and/or glass as material, where the glass is a quartz glass that is formed in opaque manner. The induction body consists of a high temperature resistant, electrically conductive material such as tungsten and/or titanium. The induction body is formed as a hollow cylinder in the area of the section. An independent claim is included for a method for evaporating material in gas flow.