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发明名称
Silicon-Containing Film-Forming Composition, Silicon-Containing Film, Silicon-Containing Film-Bearing Substrate, and Patterning Method
摘要
申请公布号
KR101042415(B1)
申请公布日期
2011.06.16
申请号
KR20070035028
申请日期
2007.04.10
申请人
发明人
分类号
G03F7/075;G03F7/11
主分类号
G03F7/075
代理机构
代理人
主权项
地址
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