| 摘要 |
PROBLEM TO BE SOLVED: To provide a process management system capable of analyzing information otained by a device quickly. SOLUTION: The process management system includes: a first acquisition means (control monitoring part 20) for acquiring state information showing the state of each part of a vacuum process device 1; a second acquisition means (control monitoring part 20) for acquiring control information on the control of the vacuum process device; an association means (a timer 34) for making the state information obtained by the first acquisition means associated with the control information obtained by the second acquisition means; a storage means (log storage device 2) for storing the state information and the control information associated by the association means; an analysis means (analysis device 4) for performing analysis processing to the state information in reference to the control information, and a presentation means (analysis device 4) for presenting the information obtained as a result of the analysis by the analysis means. The analysis means performs the processing of extracting predetermined state information using predetermined control information as a start point or an end point, and performs processing for calculating a time in which the extracted predetermined state information is applicable to a predetermined condition. The presentation means presents the time calculated by the analysis means. COPYRIGHT: (C)2011,JPO&INPIT |
