发明名称 PROCESSING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a processing apparatus for forming an installation space as a small area. SOLUTION: This processing apparatus has a plurality of inflow ports for making fluid flow in the processing apparatus from a fluid supply source and a plurality of outflow ports for making the fluid used in the processing apparatus flow out to the outside of the processing apparatus, and is characterized in that the inflow ports and the outflow ports are formed on a right-side or left-side side surface to the operation side where an operator operates the processing apparatus, and the inflow ports and the outflow ports are not formed on a back face. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011115863(A) 申请公布日期 2011.06.16
申请号 JP20090273052 申请日期 2009.12.01
申请人 DISCO ABRASIVE SYST LTD 发明人 MATSUYAMA TOSHIFUMI;SEKIYA KAZUMA
分类号 B23Q1/00;B23Q11/00;H01L21/301;H01L21/304 主分类号 B23Q1/00
代理机构 代理人
主权项
地址