| 摘要 |
PROBLEM TO BE SOLVED: To provide an MEMS optical scanner, enlarging optical deviation angle, and preventing emission of unnecessary light. SOLUTION: The MEMS optical scanner is formed using SOI substrate (a semiconductor substrate) 100, and includes: an outer frame part 10; a movable part 20 provided with a mirror surface 21; a movable part forming substrate 1 having a pair of torsion springs 30, 30; and a first cover substrate 2 formed by using a first glass substrate 200 and joined to one surface side of the movable part forming substrate 1. A diffraction grating 5 is formed on the mirror surface 21 of the movable part 20 of the movable part forming substrate 1, and the first cover substrate 2 constitutes a cover substrate for shading outside of diffraction light having a specific order among diffraction light having a negative order on the reverse side of incident light with respect to a normal of the diffraction grating 5. COPYRIGHT: (C)2011,JPO&INPIT |
