METHOD AND APPARATUS FOR CONVEYING SUBSTRATE CARRIER WITHIN ELECTRONIC DEVICE MANUFACTURING FACILITY

摘要

PROBLEM TO BE SOLVED: To provide a method and apparatus for conveying a substrate carrier within an electronic device manufacturing facility. SOLUTION: A method for conveying a substrate carrier within an electronic device manufacturing facility includes: a step 205 of receiving a request to convey a carrier from a first substrate loading station to a second substrate loading station in an electronic device manufacturing facility including a plurality of carrier supports coupled to a conveyor system carrying the carrier and a plurality of substrate loading stations; a step 207 of assigning one of the plurality of carrier supports to convey the carrier from the first substrate loading station to the second substrate loading station such that at least a time required for the conveyance is reduced and balance of the conveyor system is maintained; a step 209 of carrying the carrier from the first substrate loading station; and a step 211 of carrying the carrier to the second substrate loading station. COPYRIGHT: (C)2011,JPO&INPIT