METHOD FOR MANUFACTURING BULK WAVE ACOUSTIC RESONATOR OF FBAR TYPE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a bulk wave acoustic resonator of an FBAR type. SOLUTION: The method of manufacturing the bulk wave acoustic resonator (FBAR) including locally a partially-suspended thin layer of a piezoelectric material 10 includes steps for: forming at least one first so-called lower electrode 12 on the surface of a thin layer of the piezoelectric material 10; depositing a so-called sacrificial layer on the surface of the thin layer of the piezoelectric material 10 and on the surface of the first electrode defining a first set; assembling the first set with a second substrate 20; forming at least one second electrode called as an upper electrode 21 on the opposite face of the thin layer of the piezoelectric material 10 from a face comprising the first electrode; and eliminating the sacrificial layer so as to expose the thin layer of the piezoelectric material 10 and the first electrode, and to define the bulk wave resonator. COPYRIGHT: (C)2011,JPO&INPIT