发明名称 SCALABLE QUANTUM WELL DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 A quantum well device and a method for manufacturing the same are disclosed. In one aspect, the device includes a quantum well region overlying a substrate, a gate region overlying a portion of the quantum well region, a source and drain region adjacent to the gate region. The quantum well region includes a buffer structure overlying the substrate and including semiconductor material having a first band gap, a channel structure overlying the buffer structure including a semiconductor material having a second band gap, and a barrier layer overlying the channel structure and including an un-doped semiconductor material having a third band gap. The first and third band gap are wider than the second band gap. Each of the source and drain region is self-aligned to the gate region and includes a semiconductor material having a doped region and a fourth band gap wider than the second band gap.
申请公布号 US2011140087(A1) 申请公布日期 2011.06.16
申请号 US201113034592 申请日期 2011.02.24
申请人 IMEC;KATHOLIEKE UNIVERSITEIT LEUVEN 发明人 HELLINGS GEERT;ENEMAN GEERT;MEURIS MARC
分类号 H01L29/778;H01L21/335 主分类号 H01L29/778
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