发明名称 GERMANIUM INGOTS/WAFERS HAVING LOW MICRO-PIT DENSITY (MPD) AS WELL AS SYSTEMS AND METHODS FOR MANUFACTURING SAME
摘要 Systems and methods are disclosed for crystal growth including features of reducing micropit cavity density in grown germanium crystals. In one exemplary implementation, there is provided a method of inserting an ampoule with raw material into a furnace having a heating source, growing a crystal using a vertical growth process wherein movement of a crystallizing temperature gradient relative to the raw material/crucible is achieved to melt the raw material, and growing, at a predetermined crystal growth length, the material to achieve a monocrystalline crystal, wherein monocrystalline ingots having reduced micro-pit densities are reproducibly provided.
申请公布号 WO2011072278(A2) 申请公布日期 2011.06.16
申请号 WO2010US59990 申请日期 2010.12.13
申请人 AXT, INC.;LIU, WEIGUO;LI, XIAO 发明人 LIU, WEIGUO;LI, XIAO
分类号 C30B29/08;C30B9/00;H01L21/02 主分类号 C30B29/08
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