DISPLAY DEVICE AND METHOD OF MANUFACTURING DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce effect due to hydrogen in carrying out hydrogen plasma treatment in the thin-film transistor substrate of a display device. SOLUTION: Copper wiring formed on an amorphous silicon layer formed of an amorphous silicon film is provided with a thin-film transistor substrate having a copper alloy layer 107A formed of alloy with copper, as main components, which contains elements in which the generation energy of hydride is negative as first additional elements and second additional elements, and a pure copper layer 107B formed of pure copper on the copper alloy layer. COPYRIGHT: (C)2011,JPO&INPIT