发明名称 |
TRI WAVELENGTH INTERFERENCE MODULATOR AND A METHOD FOR MODULATION |
摘要 |
The present invention relates to a tri wavelength interference modulator (TWIM) and a method of tri wavelength interference modulation. The tri wavelength interference modulator includes: a stationary substrate with a bottom electrode plate formed on top of the stationary substrate; a first electrode plate comprising a first suspended beam suspended in parallel above the stationary substrate and a first connection electrically connected onto the stationary substrate; and a second electrode plate comprising a second suspended beam suspended in parallel above the first electrode plate and a second connection electrically connected onto the stationary substrate. The inference modulator and the method for inference modulation are suitable to projection system.
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申请公布号 |
US2011141545(A1) |
申请公布日期 |
2011.06.16 |
申请号 |
US20100965009 |
申请日期 |
2010.12.10 |
申请人 |
SHANGHAI LEXVU OPTO MICROELECTRONICS TECHNOLOGY CO., LTD. |
发明人 |
HUANG HERB HE |
分类号 |
G02B26/00 |
主分类号 |
G02B26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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