| 发明名称 |
THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THIN FILM DEPOSITION APPARATUS |
| 摘要 |
A thin film deposition apparatus to remove static electricity generated between a substrate and a mask, and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus.
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| 申请公布号 |
US2011143473(A1) |
申请公布日期 |
2011.06.16 |
| 申请号 |
US20100962910 |
申请日期 |
2010.12.08 |
| 申请人 |
SAMSUNG MOBILE DISPLAY CO., LTD. |
发明人 |
JI CHANG-SOON;KIM TAE-SEUNG;LEE JONG-WOO;AN CHENGGUO |
| 分类号 |
H01L51/52;B05C17/10 |
主分类号 |
H01L51/52 |
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