| 摘要 |
<p>A defect on the surface of a workpiece is captured, information for correction is created, a foreign object requiring correction is selected, the center of the selected foreign object, that is, the foreign object center (Xa) is identified, and the center of an abrading head is shifted from this foreign object center (Xa) to a direction opposite to the direction in which an abrasive tape is paid out. Then, while paying the abrasive tape out from a supply reel and winding the abrasion tape on a take-up reel, the portion of the abrasive tape between the supply reel and the take-up reel is pressed against the abrading head, and the foreign object on the surface of the workpiece is abraded and corrected. Due to the above, even if a hard foreign object or a brittle foreign object sticks to the surface of the workpiece, correction by abrasion can be performed efficiently without worsening quality.</p> |
