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发明名称
Verfahren zum Herstellen eines Trench-Metalloxid-Halbleiter-Feldeffekttransistors
摘要
申请公布号
DE112005003584(B4)
申请公布日期
2011.06.16
申请号
DE200511003584T
申请日期
2005.05.24
申请人
VISHAY-SILICONIX, SANTA CLARA
发明人
PATTANAYAK, DEVA;QI, JASON JIANHAI;BAI, YUMING;LUI, KAM-HONG;WONG, RONALD
分类号
H01L21/336;H01L29/78
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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