摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thin light-weight planar X-ray detector having significantly improved reliability of the X-ray detector, especially reliability against external shocks. <P>SOLUTION: The planar X-ray detector 10 includes an X-ray detection panel 1, in which a fluorescent film is formed on a photoelectric conversion substrate on which photoelectric conversion elements are formed; a support substrate 2 for holding the X-ray detection panel 1; a circuit substrate 6 for driving the X-ray detection panel 1; and a chassis part 9 for housing at least the X-ray detection panel 1, support substrate 2 and circuit substrate 6, wherein a protective plate 11 having a laminated structure, by pinching a viscoelastic material between at least 2 elastic plates disposed, in the X-ray incident-plane side of the chassis 9. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |