| 摘要 |
PROBLEM TO BE SOLVED: To prevent a solidified product of vaporized components from falling onto a substrate while suppressing blockage of an exhaust passage owing to solidification of components vaporized from a coating. SOLUTION: In a treatment vessel 100, a first rectifying plate 140 with multiple first through holes 142 is disposed over a stage 130, and a second rectifying plate 150 with multiple second through holes 152 is disposed over the first rectifying plate 140 within the treatment vessel 100. A cooling portion 160 is provided to cool the second rectifying plate 150. An exhaust port 120, which is provided to the treatment vessel 100, is disposed opposite the stage 130 across the second rectifying plate 150. In a planar view, the second through holes 152 do not overlap the first through holes 142. COPYRIGHT: (C)2011,JPO&INPIT
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