| 摘要 |
The film adhering device according to the present invention comprises: a substrate adsorption unit having a substrate adsorption plate for adsorbing a substrate, and a substrate-conveying rotation table movably mounted to the substrate adsorption plate and adapted to rotate while moving the substrate adsorption plate into an adhering position; a film adsorption unit having a film adsorption plate for adsorbing a film to be adhered to the substrate, a film-conveying rotation table mounted to the film adsorption plate for rotatably moving the film adsorption plate into an adhering position to make the film adsorption plate face the substrate adsorption plate, and a film adsorption plate tilting device mounted to the film conveying rotation table for tilting the film adsorption plate to the adhering position, towards the substrate adsorption plate; a substrate adsorption plate conveying device for moving the substrate adsorption plate to gradually adhere the film to the substrate from one end of the film to the other end, when the film adsorption plate, which is moved to the adhering position, is tilted so that the one end of the film that is adsorbed to the film adsorption plate is attached to the substrate that is adsorbed to the substrate adsorption plate; and at least one or more vacuum pumps for supplying vacuum pressure to the substrate adsorption plate and the film adsorption plate. |
