COMBINATORIAL TYPE PLASMA PROCESS TESTING METHOD, AND INCLINED PLASMA GENERATING DEVICE

摘要

PROBLEM TO BE SOLVED: To easily optimize external conditions of a plasma process.

SOLUTION: There is provided a small-sized plasma generating device capable of establishing a state in which a plasma density is different depending on positions as shown in 4.A, and a radical density is different depending on positions as shown in 4.B. In this small-sized plasma generating device, an object to be processed by the plasma process and a material-forming substrate are arranged, and the plasma process is executed while measuring the plasma density and the radical density on a surface of the processed object. Resultant products of the plasma process are evaluated by positions and the plasma density and the radical density are decided at the positions at the highest evaluations. Moreover, in another large-sized or batch type plasma process, external conditions are adjusted so as to create those optimum plasma density and radical density. These adjustments need no plasma processing and the like for the processed object etc.

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