| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a device for manufacturing a thin film solar cell that is superior in productivity and manufacturing cost, and can have a high throughput and prevents conversion efficiency as a thin film solar cell from decreasing. <P>SOLUTION: The device for manufacturing the thin film solar cell includes a film formation chamber 11, a charging/taking-out chamber, a substrate attachment/detachment chamber, and carriers for holding substrates with their film-formed surfaces substantially in parallel with the gravity direction, and is configured to carry a plurality of carriers in and out of a film formation chamber between the charging/taking-out chamber and the film formation chamber and to simultaneously form films on the plurality of substrates held by the plurality of carriers in the film formation chamber. The device is provided with a supply pipe 151 having a plurality of nitrogen gas-jetting mechanisms 170 capable of jetting nitrogen gas to by-products sticking in the film formation chamber, and a nitrogen gas supply source 158 for supplying the nitrogen gas to the supply pipe, the nitrogen gas jetting mechanisms each having a jet hole for jetting the nitrogen gas to the supply pipe while rotating. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
