发明名称 METHOD FOR DEPOSITING GRAPHENE FILM
摘要 Provided is a method of depositing a graphene film. In the method includes supplying a gaseous-phase graphene source to a substrate, forming an adsorbed layer on the substrate by the graphene source, and activating the adsorbed layer by heating the adsorbed layer. Therefore, a uniform graphene film having a large area can be formed.
申请公布号 US2011143034(A1) 申请公布日期 2011.06.16
申请号 US20100829381 申请日期 2010.07.01
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 AHN SEONGDEOK;KANG SEUNG YOUL
分类号 C23C16/26 主分类号 C23C16/26
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