ELECTRON BEAM BIPRISM DEVICE AND ELECTRON BEAM DEVICE
摘要
<p>Disclosed are an electron beam biprism device and an electron beam device, wherein, in order to implement a fringe scan method in an electron beam interferometer, a deflection function in one direction is added to the function of an electron beam biprism, and electron beams passing the left and right sides of a filament electrode can be respectively deflected at different angles.</p>
