AUTO-SEQUENCING INLINE PROCESSING APPARATUS

摘要

PURPOSE: An auto-sequencing inline processing apparatus is provided to process a plurality of substrate with high accuracy and throughput by detecting and collecting a broken substrate. CONSTITUTION: In an auto-sequencing inline processing apparatus, A loadlock chamber(110) is combined in one side of a chamber(100). An exchange station is combined with the loadlock chamber opposite to the chamber. An upper hanger supports at lest one substrate. A lower hanger supports at least one substrate. A controller(140) opens the valve(102) to exchange the substrate.