| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To manufacture, at low cost, an optical element having a low refractive index film. <P>SOLUTION: In a step of manufacturing the optical element having a multilayered film in which a low refractive index film and a high refractive index film are alternately laminated, by means of a sputtering film forming apparatus using a target unit 100, a porous film composed of a low refractive index material with a filling rate≤0.84 is formed on a substrate 101. By immersing the porous film in a liquid≤50°C, the refractive index is reduced. A high quality optical element can be achieved at low cost, by forming a low refractive index film having a lower refractive index by a simple step. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
