| 摘要 |
PROBLEM TO BE SOLVED: To provide a device capable of speedily cooling a substrate to a target temperature and performing uniform cooling. SOLUTION: An ESC stage is provided with an inner region 25 and an outer region 26 into which a heat transfer gas can be introduced, and an exhaust groove 30 is provided therebetween. An exhaust region is in a shape of a groove sandwiched between an inner peripheral partition 34 for the inner region 25 and an intermediate partition 29 for the outer region 26, and the inner region and the outer region are exhausted through the inner peripheral partition 34 and the intermediate partition 29. COPYRIGHT: (C)2011,JPO&INPIT |
