| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an atomic oscillator capable of reducing a unit cost by shortening a manufacturing process. SOLUTION: The atomic oscillator 50 is configured by including a photodetector (PD) 6 with a light receiver formed on a semiconductor substrate, a cell layer 8 laminated on the photodetector 6 with a cavity 8b including an opening 8a in the upper part of the light receiver, and gaseous alkali-metal atoms 5 sealed into the cavity 8b. The atomic oscillator is further configured by including cover glass (transparent member) 4 sealing the opening 8a and a light-emitting element (VCSEL) 1 emitting resonant light to the alkali-metal atoms 5 through the cover glass 4. The photodetector (PD) 6 includes an electrode 7, and the electrode 3 for the light-emitting element 1 is formed on the cover glass 4. The light-emitting element is connected to the electrode 3 for the light-emitting element 1 through bumps 2 for the light-emitting element 1. COPYRIGHT: (C)2011,JPO&INPIT
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